| Type |  Book |
| ชื่อเรื่อง | Optical inspection of microsystems [electronic resource] / edited by Wolfgang Osten |
| ISBN | 0429186738 (electronic book) |
| | 9780429186738 (electronic book) |
| พิมพลักษณ์ | Boca Raton, FL : CRC Press/Taylor & Francis Group, [2020] |
| ครั้งที่พิมพ์ | Second edition |
| รูปเล่ม | 1 online resource : illustrations |
| ลิงค์ | Click here to access |
| หัวเรื่อง | Optical measurements |
| | Industrial microscopy |
| | Microelectromechanical systems --Inspection [] |
| | Quality control --Optical methods [] |
| | Technology & engineering / industrial engineering |
| | Technology & engineering / industrial technology |
| | Technology & engineering / manufacturing |
| | Technology & engineering / technical & manufacturing industries & trades |